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previously published November 2009
SEMI C35-0699 (first published - replaces SEMI C1
The use of AFM for measuring the roughness of polymer surfaces is outlined in this test method
This Document also provides guidelines for grades of methyl ethyl ketone for which a need has been identified
12-94 (technical revision)
D01100 - SEMI D11 - Specification for Flat Panel Display Glass Substrate Cassettes StdVol-Flat Panel Display previously published November 2009This Standard was technically approved by the Flat Panel Display Factory Automation Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 13, 2009. Available at www. semi. org in July 2009; originally published in 1995; previously published July 2003. NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met.