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動機付け
or environmental tests of the minienvironment
SEMI PV68-0815 (first published)
atmospheric pressure ionization mass spectrometry (APIMS) is currently the technique of choice for such tests because it is essentially the only commercially available method capable of ppt moisture analysis and because of its superior response time
in unambiguous terms
E09800 - SEMI E98 - Provisional Standard for the Object-Based Equipment Model (OBEM) StdTpc-Package Specifications 動機付けPurposes of the Object Based Equipment Model include the following: Define a standard model for interfacing to multi process equipment and other complex equipment. Define standard equipment components so that communications can "discuss" component related issues. Provide an equipment model that can be easily integrated with SEMI E81 CIM Framework systems by connecting an OBEM compliant equipment to a Machine object. The purpose of the Object Based
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