E11000 - SEMI E110 - Guideline for Indicator Placement Zone and Switch Placement Volume of Load Port Operation Interface for 300 mm Load Ports StdTpc-Silicon on Insulator homogeneous layer of polysilicon or

homogeneous layer of polysilicon or low temperature oxide (LTO)

SEMI F98-0326 (technical revision)

2  In many advanced wafer applications

1-0312 (technical revision)

The marking code includes information on the origin

E11000 - SEMI E110 - Guideline for Indicator Placement Zone and Switch Placement Volume of Load Port Operation Interface for 300 mm Load Ports StdTpc-Silicon on Insulator homogeneous layer of polysilicon orNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. This guideline defines the zones and volumes in which load port status indicators and load port operation switches should be placed. The purpose of this guideline is to give a similarity in the placement of them on a 300 mm