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The scope of this Document covers high purity TDMAS which is used in the semiconductor industry for the deposition of silicon oxide and silicon nitride based layers by atomic layer deposition
silicon nitride based layers by atomic layer deposition
5-1104 (technical revision)
This Specification covers requirements
one of the package types
T00400 - SEMI T4 - Specification for 150 mm and 200 mm Pod Identification Dimensions StdPbc-0812 The scope of this DocumentThe purpose of this Specification is to ensure dimensional compatibility when mounting pod identification tags and tag identification devices. The scope of this Specification is to define: free space at a pod to allow the mounting of a pod identification tag, and free space to allow data transmission. This Specification is applicable to 150 mm and 200 mm Standard Mechanical Interfaces (SEMI E19). The space required for pod handling per SEMI E47 is
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