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SEMI E132-1107 (technical revision)
This Test Method utilizes the relationship between carbon concentration and the absorption coefficient of the infrared absorption band associated with substitutional carbon in silicon
lithography exposure equipment
SEMI F13 — Guide for Gas Source Control Equipment
3 Internal feeders work in a high temperature environment
G07900 - SEMI G79 - Specification for Overall Digital Timing Accuracy Revision:SEMI G79-0200 - Inactive SEMI E132-1107 (technical revision)This Standard was technically approved by the global Automated Test Equipment Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 24, 2011. Available at www. semiviews. org and www. semi. org in May 2012; originally published February 2000. This Standard is intended to provide a minimum common definition of timing accuracy specifications for semiconductor automatic test equipment
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