E05600 - SEMI E56 - 熱マスフローコントローラの精度，直線性，リピータビリティ，短期再現性，ヒステリシス（履歴現象）およびデッドバンドを判断するテスト方法 StdPbc-0716 5 The metrology examples provided

5  The metrology examples provided in this Guide originated from industry experts and are believed to be representative of tool performance as of the year 2012

" Where an analytical procedure different from that provided is substituted by a supplier or user

SEMI T9-1110 (Reapproved 0216)

This Standard specifies the following contents of IDs to be installed onto the jigs used in the process of semiconductor manufacturing

SEMI D74-0116 (first published)

E05600 - SEMI E56 - 熱マスフローコントローラの精度，直線性，リピータビリティ，短期再現性，ヒステリシス（履歴現象）およびデッドバンドを判断するテスト方法 StdPbc-0716 5 The metrology examples providedMFC111MFC MFCMFC Referenced SEMI Standards SEMI E17 Guideline for Mass Flow Controller Transient Characteristics Tests