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SEMI E133-1218 (Reapproved 0324)
本ガイドは観測された欠陥で覆われたウェーハ表面のわずかな部分の決定を容易にするウェーハグリッドを使用するためのデザインおよびガイダンスを提供する。
orgで入手可能となる。初版は1998年6月に発行，前版は2004年7月に発行された。
worldwide definition of linearity in order to prevent confusion and misunderstanding between manufacturers and users of mass flow devices
SEMI E90-0705 (technical revision)
F03400 - SEMI F34 - Guide for Liquid Chemical Pipe Labeling Revision:SEMI F34-0618 - Current SEMI E133-1218 (Reapproved 0324)This Standard was technically approved by the Liquid Chemicals Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 13, 2017. Available at www. semiviews. org and www. semi. org in June 2018; originally published in September 1998. This Document establishes a recommended scheme for labeling liquid process chemical piping systems used in semiconductor manufacturing facilities
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