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This Specification describes equipment provided services to the factory that supports a high level of factory automation
This Standard does not define the physical shape or geometry of a sapphire
SEMI E33-0217 (technical revision)
The format and algorithm for the Data Matrix code is based on two-dimensional symbology specified in ISO/IEC 16022
loader/unloader and robot)
M03500 - SEMI M35 - 自動検査により検出されるシリコンウェーハ表面特性の仕様を開発するためのガイド Revision:SEMI M35-1107 - Superseded This Specification describes equipment providedglobal Silicon Wafer Committee200795global Audits and Reviews Subcommittee200710www. semi. org200711CD ROM19992200511 SSISscanning surface inspection systems Referenced SEMI Standards SEMI M1 Specifications for Polished Monocrystalline Polished Silicon Wafers SEMI M53 Practice for Calibrating Scanning Surface Inspection Systems using Depositions of Monodisperse Polystyrene Latex Sphere on Unpatterned Semiconductor Wafer Surfaces