E01000 - SEMI E10 - Specification for Definition and Measurement of Equipment Reliability, Availability, and Maintainability (RAM) and Utilization Revision:SEMI E10-0600 - Superseded 2 This Standard establishes limits

2 This Standard establishes limits on impurities extractable from components

previously published March 2010

it distinguishes between mechanical and diffusion leak rates

A standardization of the communication concept between FMCS and FPUs will support FPU manufacturers

This Standard is intended for ISEM equipment that generates data and information about anomalies and defects found on substrates

E01000 - SEMI E10 - Specification for Definition and Measurement of Equipment Reliability, Availability, and Maintainability (RAM) and Utilization Revision:SEMI E10-0600 - Superseded 2 This Standard establishes limits1 Purpose 1. 1 This Specification establishes a common basis for communication between users and suppliers of manufacturing equipment in the semiconductor and related industries by providing a standardized methodology for measuring reliability, availability, and maintainability (RAM) and utilization performance of equipment in a manufacturing environment. 2 Scope 2. 1 This Specification defines six mutually exclusive, basic equipment states for all of