G07800 - SEMI G78 - Test Method for Comparing Automated Wafer Probe Systems Utilizing Process-Specific Measurements StdTpc-Process Chemicals - Acids SEMI MF674 — Practice for

SEMI MF674 — Practice for Preparing Silicon for Spreading Resistance Measurements

767ブロックよりなる。各ブロックヘッダには，あるメッセージの一部のブロックであるという情報が含まれている。メッセージは要求と応答が対をなし，その対をトランザクションという。

SEMI MF26-0305 (Reapproved 0211)

The purpose of this document is to specify a new means of identification with the Micro ID on 300mm polished monocrystalline Silicon wafer with polished edge for process control

and electrical probe testing

G07800 - SEMI G78 - Test Method for Comparing Automated Wafer Probe Systems Utilizing Process-Specific Measurements StdTpc-Process Chemicals - Acids SEMI MF674 — Practice forThis test method was technically approved by the global Automated Test Equipment Committee and is the direct responsibility of the North American Automated Test Equipment Committee. Current edition approved by the North American Regional Standards Committee on December 18, 1998. Initially available at www. semi. org April 1999; to be published June 1999. To define the terms and provide a means of comparative, or relative measurement for the automated