C09000 - SEMI C90 - Specification for Perfluoroalkoxy Alkane (PFA) and Other Fluorinated Materials Used In Liquid Chemical Distribution Systems Revision:SEMI C90-1015 - Superseded This edition was approved for

This edition was approved for publication by the global Audits and Reviews Subcommittee on June 18

35-1109 (technical revision)

To define the specification and analytical methods and validate the specifications for diborane mixtures

This Standard applies to two and four fastener configurations

SEMI C30-0600 (technical revision)

C09000 - SEMI C90 - Specification for Perfluoroalkoxy Alkane (PFA) and Other Fluorinated Materials Used In Liquid Chemical Distribution Systems Revision:SEMI C90-1015 - Superseded This edition was approved for1 Purpose 1. 1 This standard specifies extraction limits for metals from liquid chemical distribution system components (e. g., tubing, fittings, and valves). 1. 2 This standard specifies procedures to measure extractable metal impurities from perfluoroalkoxy alkane (PFA) and other fluorinated materials and from high purity liquid distribution components. 2 Scope 2. 1 This Standard applies to the determination of metal extractable impurity