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This Document covers requirements for hexafluoroethane used in the semiconductor industry
The scope of this Specification is for grades of phosphoric acid used in the semiconductor industry
SEMI 3D16-0822 (technical revision)
35-88 (first published)
This also complicated the variety of shapes and colors for markers
A00100 - SEMI A1 - Specification for Production Equipment Smart Connection Interface (PESCI) Revision:SEMI A1-0918 - Superseded This Document covers requirements for* This Standard has the option to purchase the Current document with a redline document (Current + Redline). The redline document is included with the Current document as a comparison tool to help identify changes that have been made between the Current version and the previous version (Superseded). If differences should exist between the redline document and the Current document, the Current version is the official and authoritative version. 1
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