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and review data management
6 This Guide also provides a measurement procedure for local bow
Reactive gases shall not be used as they may react chemically with moisture
including:
• Type of an equipment under test (EUT) liquid-borne particle counter
E16400 - SEMI E164 - Specification for EDA Common Metadata Revision:SEMI E164-0313E - Superseded and review data managementThe purpose of this Specification is to promote commonality among implementations by defining common representations and conventions of equipment metadata based on SEMI E125 Specification for Equipment Self Description. The scope of this Specification includes: Common approaches for defining specific elements of equipment metadata The metadata representation of selected SEMI Communication Standards, including those widely used in 300 mm semiconductor