S00500 - SEMI S5 - Safety Guideline for Sizing and Identifying Flow Limiting Devices for Gases StdTpc-Package & Chip Carrier Tooling SEMI M64-0915 (Reapproved 0422)

SEMI M64-0915 (Reapproved 0422)

·    括弧內的數值

The standardization of these technologies is also necessary to provide the CIM/FA infrastructure in a short period of time at a low cost

To identify a test method for measuring the hydrostatic strength of thermoplastic pipe and tubing

The purpose of this document is to provide a guide for the design

S00500 - SEMI S5 - Safety Guideline for Sizing and Identifying Flow Limiting Devices for Gases StdTpc-Package & Chip Carrier Tooling SEMI M64-0915 (Reapproved 0422)The purpose of this Safety Guideline is to provide information and methods related to flow limiting devices (FLDs) that limit the rate of release of hazardous gases during transportation, storage, and use. This Safety Guideline pertains to FLDs for hazardous gases. These devices are intended to limit the flow rate of uncontrolled releases of gases at or downstream of the FLDs. This Safety Guideline pertains to FLDs operating at critical flow rates