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2公分）。
This method focuses on improving the accuracy and repeatability of the measurement by standardizing the test conditions and reporting and by routine calibration of the measurement
SEMI D22 — Test Method for the Determination of Color
露光装置（スキャナ，ステッパー&トラック）
SEMI F49-0200 (Reapproved 1213)
S00200 - SEMI S2 - 반도체 제조장비에 대한 환경안전보건 가이드라인 StdPbc-1017 2公分）。NOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any language, the English version is the official and authoritative version. : , , . krstandards@semi. org. . 1 (Purpose) 1. 1 (performance based) EHS(, ) . 2 (Scope) 2. 1 (Applicability) , , . 2. 2 (Precedence of Sectional Requirements) . Referenced SEMI Standards (purchase separately) SEMI E6 Guide for Semiconductor