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including FOUPs and open cassettes
本ドキュメントの目的は，(1) 20/0
1 This Guide does not include site-specific conditions
1 This Specification is a central location for the definition of common Protocol Buffers elements that are not specific to a single standard
5 µm to 2 µm thick
E18900 - SEMI E189 - Specification for Equipment Management of Consumables and Durables (EMCD) Revision:SEMi E189-0524E - Current including FOUPs and open cassettesE This Standard was editorially modified to correct a publication error. A correction was made to Figure 1. This Specification provides a standardized behavior for host communication with manufacturing equipment during the removal, installation and usage of consumables and durables. This Specification defines objects and state models that define the interaction between the host and equipment in the following scenarios: Durable removal, installation,