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SEMI C27-0600 (technical revision)
replaced by SEMI C70
SEMI C44-0708 (technical revision)
This Document covers requirements for octafluorocyclobutane (C4F8) used in the semiconductor industry
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C03600 - SEMI C36 - Specification for Phosphoric Acid StdPbc-0924 SEMI C27-0600 (technical revision)The purpose of this Specification is to standardize requirements for phosphoric acid used in the semiconductor industry and testing procedures to support those standards. Test methods have been shown to give statistically valid results. Alternative methods may be used as long as they comply with SEMI C1 requirements for method validation. The scope of this Specification is for grades of phosphoric acid used in the semiconductor industry. Referenced
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