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C00326 - SEMI C3.26 - Specification for Tungsten Hexafluoride (WF6) in Cylinders, 99.8% Quality StdPbc-0421 org in February 2000

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Description

org in February 2000

The purpose of this Document is to provide a guide for pentakis dimethylamino tantalum (PDMAT) for which a need has been identified

This Document also provides a guide for grades of trimethylborate for which an industry need has been identified

originally published in 1981

including lithography and electrical contact between metal layers on the bonded wafers

C00326 - SEMI C3.26 - Specification for Tungsten Hexafluoride (WF6) in Cylinders, 99.8% Quality StdPbc-0421 org in February 2000NOTICE: This Document was balloted and approved for withdrawal in 2011. It was replaced by SEMI C70. Tungsten hexafluoride is a colorless gas or colorless liquid. It is shipped as a liquefied gas under its own vapor pressure. Referenced SEMI Standards (purchase separately) None. Revision History SEMI C3. 26 0301 (Withdrawn 0312, replaced by SEMI C70) SEMI C3. 26 0301 (technical revision) SEMI C3. 26 94 (technical revision) SEMI C3. 26 93 (technical

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